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dc.contributor.authorLiu, Tianbo
dc.contributor.authorRajadhyaksha, Milind
dc.contributor.authorDickensheets, David L.
dc.date.accessioned2019-10-07T21:20:43Z
dc.date.available2019-10-07T21:20:43Z
dc.date.issued2019-06
dc.identifier.citationLiu, Tianbo, Milind Rajadhyaksha, and David L. Dickensheets. "MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope." Light 8 (June 2019): 1-11. DOI:10.1038/s41377-019-0167-5.en_US
dc.identifier.issn2047-7538
dc.identifier.urihttps://scholarworks.montana.edu/xmlui/handle/1/15716
dc.description.abstractLaser scanning microscopes can be miniaturized for in vivo imaging by substituting optical microelectromechanical system (MEMS) devices in place of larger components. The emergence of multifunctional active optical devices can support further miniaturization beyond direct component replacement because those active devices enable diffraction-limited performance using simpler optical system designs. In this paper, we propose a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning, axial focus adjustment, and control of spherical aberration. The MEMS-in-the-lens architecture incorporates a reflective MEMS scanner between a low-numerical-aperture back lens group and an aplanatic hyperhemisphere front refractive element to support high-numerical-aperture imaging. We implemented this new optical system using a recently developed hybrid polymer/silicon MEMS three-dimensional scan mirror that features an annular aperture that allows it to be coaxially aligned within the objective lens without the need for a beam splitter. The optical performance of the active catadioptric system is simulated and imaging of hard targets and human cheek cells is demonstrated with a confocal microscope that is based on the new objective lens design.en_US
dc.rightsCC BY: This license lets you distribute, remix, tweak, and build upon this work, even commercially, as long as you credit the original creator for this work. This is the most accommodating of licenses offered. Recommended for maximum dissemination and use of licensed materials.en_US
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/legalcodeen_US
dc.titleMEMS-in-the-lens architecture for a miniature high-NA laser scanning microscopeen_US
dc.typeArticleen_US
mus.citation.journaltitleLighten_US
mus.citation.volume8en_US
mus.identifier.doi10.1038/s41377-019-0167-5en_US
mus.relation.collegeCollege of Engineeringen_US
mus.relation.departmentElectrical & Computer Engineering.en_US
mus.relation.universityMontana State University - Bozemanen_US
mus.data.thumbpage3en_US


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CC BY: This license lets you distribute, remix, tweak, and build upon this work, even commercially, as long as you credit the original creator for this work. This is the most accommodating of licenses offered. Recommended for maximum dissemination and use of licensed materials.
Except where otherwise noted, this item's license is described as CC BY: This license lets you distribute, remix, tweak, and build upon this work, even commercially, as long as you credit the original creator for this work. This is the most accommodating of licenses offered. Recommended for maximum dissemination and use of licensed materials.

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