Auger electron spectroscopy mapping of lithium niobate ferroelectric domains with nano-scale resolution
Abstract
The +/−Z ferroelectric domains in periodically poled lithium niobate are characterized with Auger electron spectroscopy. The -Z domains have a higher Auger O-KLL transition amplitude than the +Z domains. Based on this, Auger electron spectroscopy mapping can be used on the O-KLL peak to image the +/-Z domain structure. This new characterization technique is confirmed with HF etching, and compared to SEM imaging. Spatial resolution down to 68 nm is demonstrated.
Citation
Torrey McLoughlin, Wm. Randall Babbitt, and Wataru Nakagawa, "Auger electron spectroscopy mapping of lithium niobate ferroelectric domains with nano-scale resolution," Opt. Mater. Express 13, 119-129 (2023)
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