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dc.contributor.authorFlanigan, Edward Jamesen
dc.date.accessioned2015-05-12T20:52:37Z
dc.date.available2015-05-12T20:52:37Z
dc.date.issued1987en_US
dc.identifier.urihttps://scholarworks.montana.edu/xmlui/handle/1/6477en_US
dc.language.isoengen
dc.publisherMontana State University - Bozeman, College of Engineeringen
dc.subject.lcshMolybdenum.en
dc.subject.lcshSilicon.en
dc.subject.lcshSurface chemistry.en
dc.titleThe reaction kinetics and film morphology of molybenum films deposited by LPCVD on a silicone surfaceen
dc.typeThesisen
dc.rights.holderCopyright Edward James Flanigan 1987en
thesis.catalog.ckey342190en
thesis.degree.departmentChemical & Biological Engineering.en
thesis.degree.genreThesisen
thesis.degree.nameMSen
thesis.format.extentfirstpage1en
thesis.format.extentlastpage89en


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