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dc.contributor.authorPark, Chang Sooen
dc.date.accessioned2015-05-12T20:33:04Z
dc.date.available2015-05-12T20:33:04Z
dc.date.issued1988en
dc.identifier.urihttps://scholarworks.montana.edu/xmlui/handle/1/6824en
dc.language.isoenen
dc.publisherMontana State University - Bozeman, College of Engineeringen
dc.subject.lcshMolybdenumen
dc.titleSilicon-reduced LPCVD reaction kinetics and film morphology of molybdenum on Si surfacesen
dc.typeThesisen
dc.rights.holderCopyright 1988 by Chang Soo Parken
thesis.catalog.ckey57480en
thesis.degree.departmentChemical & Biological Engineering.en
thesis.degree.genreThesisen
thesis.degree.nameMSen
thesis.format.extentfirstpage1en
thesis.format.extentlastpage83en


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