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dc.contributor.authorFriholm, Robert Andreasen
dc.date.accessioned2015-05-12T20:32:32Z
dc.date.available2015-05-12T20:32:32Z
dc.date.issued2001en
dc.identifier.urihttps://scholarworks.montana.edu/xmlui/handle/1/8145en
dc.language.isoenen
dc.publisherMontana State University - Bozeman, College of Engineeringen
dc.subject.lcshSilicon nitride.en
dc.subject.lcshMirrors.en
dc.titleSilicon nitride membrane mirrors for focus controlen
dc.typeThesisen
dc.rights.holderCopyright 2001 by Robert Andreas Friholmen
thesis.catalog.ckey856621en
thesis.degree.departmentElectrical & Computer Engineering.en
thesis.degree.genreThesisen
thesis.degree.nameMSen
thesis.format.extentfirstpage1en
thesis.format.extentlastpage88en


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