The reaction kinetics and film morphology of molybenum films deposited by LPCVD on a silicone surface
| dc.contributor.author | Flanigan, Edward James | en |
| dc.date.accessioned | 2015-05-12T20:52:37Z | |
| dc.date.available | 2015-05-12T20:52:37Z | |
| dc.date.issued | 1987 | en |
| dc.identifier.uri | https://scholarworks.montana.edu/handle/1/6477 | en |
| dc.language.iso | en | en |
| dc.publisher | Montana State University - Bozeman, College of Engineering | en |
| dc.rights.holder | Copyright 1987 by Edward James Flanigan | en |
| dc.subject.lcsh | Molybdenum | en |
| dc.subject.lcsh | Silicon | en |
| dc.subject.lcsh | Surface chemistry | en |
| dc.title | The reaction kinetics and film morphology of molybenum films deposited by LPCVD on a silicone surface | en |
| dc.type | Thesis | en |
| thesis.catalog.ckey | 342190 | en |
| thesis.degree.department | Chemical & Biological Engineering. | en |
| thesis.degree.genre | Thesis | en |
| thesis.degree.name | MS | en |
| thesis.format.extentfirstpage | 1 | en |
| thesis.format.extentlastpage | 89 | en |
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