Thermodynamic interpretation of secondary ion and photon emission during sputtering of silicon

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dc.contributor.authorBurghard, Ronald Alberten
dc.date.accessioned2015-05-09T18:57:25Z
dc.date.available2015-05-09T18:57:25Z
dc.date.issued1977en
dc.identifier.urihttps://scholarworks.montana.edu/handle/1/4057en
dc.language.isoenen
dc.publisherMontana State University - Bozeman, College of Letters & Scienceen
dc.rights.holderCopyright 1977 by Ronald Albert Burgharden
dc.subject.lcshMass spectrometryen
dc.subject.lcshSecondary ion emissionen
dc.subject.lcshPhotonsen
dc.titleThermodynamic interpretation of secondary ion and photon emission during sputtering of siliconen
dc.typeDissertationen
thesis.catalog.ckey125195en
thesis.degree.departmentPhysics.en
thesis.degree.genreDissertationen
thesis.degree.namePhDen
thesis.format.extentfirstpage1en
thesis.format.extentlastpage155en

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