Etching of hydrocarbon polymers with hyperthermal neutral beams

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dc.contributor.authorSeale, James Williamen
dc.date.accessioned2015-05-12T20:35:16Z
dc.date.available2015-05-12T20:35:16Z
dc.date.issued1998en
dc.identifier.urihttps://scholarworks.montana.edu/handle/1/8505en
dc.language.isoenen
dc.publisherMontana State University - Bozeman, College of Engineeringen
dc.rights.holderCopyright 1998 by James William Sealeen
dc.subject.lcshNeutral beamsen
dc.subject.lcshPolymers--Optical propertiesen
dc.titleEtching of hydrocarbon polymers with hyperthermal neutral beamsen
dc.typeThesisen
thesis.catalog.ckey738364en
thesis.degree.departmentChemical & Biological Engineeringen
thesis.degree.genreThesisen
thesis.degree.nameMSen
thesis.format.extentfirstpage1en
thesis.format.extentlastpage83en

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