Auger electron spectroscopy mapping of lithium niobate ferroelectric domains with nano-scale resolution
Date
2022-12
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Optica Publishing Group
Abstract
The +/−Z ferroelectric domains in periodically poled lithium niobate are characterized with Auger electron spectroscopy. The -Z domains have a higher Auger O-KLL transition amplitude than the +Z domains. Based on this, Auger electron spectroscopy mapping can be used on the O-KLL peak to image the +/-Z domain structure. This new characterization technique is confirmed with HF etching, and compared to SEM imaging. Spatial resolution down to 68 nm is demonstrated.
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Keywords
auger, auger electron spectroscopy, lithium niobate, ferroelectric, nano-scale resolution
Citation
Torrey McLoughlin, Wm. Randall Babbitt, and Wataru Nakagawa, "Auger electron spectroscopy mapping of lithium niobate ferroelectric domains with nano-scale resolution," Opt. Mater. Express 13, 119-129 (2023)
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